The group's facilities are located in several rooms inside the Tel Aviv University campus. We have our own clean room, with all the equipment needed for fabrication including:
- Mask aligner
- Thermal/E-beam evaporator.
- Deep reactive ion etching machine.
- ICP-PECVD for the low temperature deposition of high quality films.
- Atomic Layer Deposition machine (ALD).
- Rapid Thermal Annealing machine (RTA).
In addition, we have a fully equipped "Wet chemistry" laboratory, an Electrochemistry lab and a Biology room. Click on a room in the schemes below to see the full details of the facilities inside that room.